JPH0213470B2 - - Google Patents

Info

Publication number
JPH0213470B2
JPH0213470B2 JP675486A JP675486A JPH0213470B2 JP H0213470 B2 JPH0213470 B2 JP H0213470B2 JP 675486 A JP675486 A JP 675486A JP 675486 A JP675486 A JP 675486A JP H0213470 B2 JPH0213470 B2 JP H0213470B2
Authority
JP
Japan
Prior art keywords
active layer
layer
mesa structure
indium
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP675486A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62165384A (ja
Inventor
Toshihiro Kusuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61006754A priority Critical patent/JPS62165384A/ja
Publication of JPS62165384A publication Critical patent/JPS62165384A/ja
Publication of JPH0213470B2 publication Critical patent/JPH0213470B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
  • Weting (AREA)
JP61006754A 1986-01-16 1986-01-16 半導体発光装置の製造方法 Granted JPS62165384A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61006754A JPS62165384A (ja) 1986-01-16 1986-01-16 半導体発光装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61006754A JPS62165384A (ja) 1986-01-16 1986-01-16 半導体発光装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62165384A JPS62165384A (ja) 1987-07-21
JPH0213470B2 true JPH0213470B2 (en]) 1990-04-04

Family

ID=11646971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61006754A Granted JPS62165384A (ja) 1986-01-16 1986-01-16 半導体発光装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62165384A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0641584U (ja) * 1992-11-18 1994-06-03 方義 渡辺 腰掛けのついた風呂桶

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6206247B2 (ja) * 2014-02-26 2017-10-04 三菱電機株式会社 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0641584U (ja) * 1992-11-18 1994-06-03 方義 渡辺 腰掛けのついた風呂桶

Also Published As

Publication number Publication date
JPS62165384A (ja) 1987-07-21

Similar Documents

Publication Publication Date Title
JP2827326B2 (ja) 半導体レーザの製造方法
JP2018139264A (ja) 光半導体素子及びその製造方法
JP2815769B2 (ja) 半導体レーザの製造方法
JPH0213470B2 (en])
JP3108183B2 (ja) 半導体レーザ素子とその製造方法
JP2542570B2 (ja) 光集積素子の製造方法
JPH07111361A (ja) 埋込型半導体レーザ素子及びその製造方法
JP2685499B2 (ja) 半導体レーザ素子
JP3652454B2 (ja) 半導体レーザ及びその製造方法
JPH0682886B2 (ja) 半導体レーザ装置の製造方法
JPH0680861B2 (ja) 半導体発光装置の製造方法
JPH0568873B2 (en])
KR950002207B1 (ko) 반도체 레이저 다이오드
JPH04229682A (ja) 半導体レーザの製造方法
JPS596588A (ja) 半導体レ−ザ
JPS61150393A (ja) 半導体レ−ザおよびその製造方法
JPS6361793B2 (en])
JPS63250886A (ja) 半導体レ−ザ素子の製造方法
JPH05206581A (ja) 半導体発光素子及びその製造方法
JP2528834B2 (ja) 半導体レ−ザ装置
JP2999520B2 (ja) 半導体発光素子の製造方法
JPH01309393A (ja) 半導体レーザ装置及びその製造方法
JP2678153B2 (ja) 半導体レーザ素子の製造方法
JPH07162078A (ja) 半導体レーザ素子及びその製造方法
JPH07111360A (ja) 埋込型半導体レーザ素子及びその製造方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term